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<p><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">第1章 绪论</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">1.1 背景</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">1.2 气态分子污染物及其分类</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">l.3 气态分子污染物的来源</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">1.3.1 外部来源</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">1.3.2 内部来源</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">1.3.3 按AMC分类的来源</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">1.3.4 按散发源分类的来源</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">参考文献</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">第2章 气态分子污染物的影响</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">2.1 AMC对制程的影响</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">2.2 各类AMC的影响</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">2.2.1 酸性分子污染物</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">2.2.2 碱性分子污染物</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">2.2.3 可凝结分子污染物</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">2.2.4 掺杂污染物</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">参考文献</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">第3章 电子洁净室气态分子污染环境控制标准及检测方法</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.1 电子洁净室环境控制标准发展历史</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.2 电子洁净室AMC相关规范简介</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.2.1 国际标准化组织ISO 14644</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.2.2 日本工业标准委员会JIS B9917</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.2.3 国际半导体设备与材料协会SEMI标准</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.2.4 中国国家标准GB/T 25915和GB/T 36306</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.2.5 国际器件与系统蓝图标准</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.3 气态分子污染相关标准总结与对比</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.3.1 不同国家和地区的洁净室控制规范</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.2.2 不同机构组织的洁净室控制规范</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.3.3 建筑环境与洁净室环境控制规范</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.3.4 大气环境与洁净室环境控制规范</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.3.5 对比讨论</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.4 洁净室AMC:检测及监测方法</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.4.1 酸性气态分子污染物检测</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.4.2 碱性气态分子污染物检测</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.4.3 可凝结气态分子污染物检测</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.4.4 掺杂污染物检测</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.5 洁净室AMC检测实际案例</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.5.1 测试背景</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.5.2 测试方法</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">3.5.3 测试结果</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">参考文献</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">第4章 吸附净化技术</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.1 吸附技术</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.1.1 物理吸附</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.1.2 化学吸附</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.1.3 去除效率与吸附容量(容污量)</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.2 吸附理论</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.2.1 吸附等温线分类</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.2.2 常见吸附等温线模型</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.2.3 吸附动力学</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.2.4 吸附穿透曲线</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.2.5 吸附带理论</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">4.2.6 吸附床压降模型</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">参考文献</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">第5章 气体污染物净化材料</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.1 物理吸附材料</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.1.1 活性炭</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.1.2 活性氧化铝</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.1.3 硅胶</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.1.4 沸石分子筛</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.1.5 金属有机框架材料</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.2 化学吸附材料</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.2.1 浸渍活性炭和氧化铝</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.2.2 离子交换树脂</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.3 吸附净化材料的选择及影响因素</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.3.1 吸附净化材料的选择</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.3.2 吸附净化材料性能的主要影响因素</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.4 气体污染物净化材料形式</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.4.1 珠状活性炭</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.4.2 负载无纺布</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.4.3 挤压型炭复合结构</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">5.4.4 黏结滤材面板</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">参考文献</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">第6章 气态分子污染控制系统及设备</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.1 电子洁净室环境控制系统</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.1.1 大厅式洁净室及局部微环境系统</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.1.2 走道隔间式洁净室系统</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.2 使用化学过滤器的气态分子污染物控制系统</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.2.1 新风处理机组(MAU)结合化学过滤器</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.2.2 回风处理机组(RAU)结合化学过滤器</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.2.3 风机过滤单元结合化学过滤器</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.3 化学过滤器</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.3.1 化学过滤器滤芯种类</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.3.2 化学过滤器结构形式</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.3.3 化学过滤器运行参数</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.4 空气水洗机</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.4.1 液气比与水雾粒径对去除效率的影响</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.4.2 吸收液水质对去除效率的影响</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.5 洁净室机台晶圆盒的AMC控制</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.5.1 气体吹扫法</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.5.2 真空充填净化</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">6.6 超纯净空气系统(UPA)</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">参考文献</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">第7章 气体净化材料及化学过滤器性能评价</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.1 气体污染物净化材料性能评价方法及指标</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.1.1 气体污染物净化材料性能评价相关标准</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.1.2 气体污染物净化材料性能评价指标及方法</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.1.3 气体污染物净化材料性能测试方法及流程</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.2 典型气体污染物净化材料的性能测试</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.2.1 典型甲苯净化材料的性能</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.2.2 典型SO2净化材料的性能</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.2.3 典型甲醛净化材料的性能</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.3 化学过滤器性能评价方法及指标</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.3.1 化学过滤器性能评价相关标准</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.3.2 化学过滤器性能评价指标及计算方法</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.3.3 化学过滤器测试流程及测试系统</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.4 典型化学过滤器甲苯净化性能测试</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.5 测试参数对净化材料或装置性能的影响</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.5.1 气体种类</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.5.2 测试浓度</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.5.3 温湿度</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.5.4 风速</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">7.5.5 床层厚度</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">附表A</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">附表B</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">参考文献</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">附录1 专用名词缩写及简称</span><br/><span style="color: rgb(102, 102, 102); font-family: tahoma, arial, "Microsoft YaHei", "Hiragino Sans GB", u5b8bu4f53, sans-serif; font-size: 14px; background-color: rgb(255, 255, 255);">附录2 半导体工艺流程简介及相关术语</span></p>
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